An electron microscope is primarily an imaging tool. Because
resolution is the key factor, SiVenture has selected the Hitachi
S-4700 Scanning Electron Microscope with 1.5 nm available -
the best on the market. This is achieved through the cold field
emission electron source, in practice unique to the top-end
Hitachi microscopes. SiVenture combines high resolution with
the Oxford Instruments Inca EDS system for mapping elemental
composition, a Robinson backscatter detector as well as EBIC
(electron beam induced current) for circuit and electronic device
analysis.
